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Effects of Duty Cycle on Nanostructured TiN Coatings on AISI H11 and AISI D2 Steels

  • Mohsen Mirzaee-Sisan,
  • Hamid Khorsand,
  • M. Hossein Siadati

摘要

This study focuses on the effects of duty cycle on morphology, hardness, structure, corrosion resistance, and chemical composition of nanostructured titanium nitride (TiN) coatings deposited by plasma-assisted chemical vapor deposition (PACVD) on two tool steels AISI H11 hot work and AISI D2 cold work. The PACVD was performed at 475 °C for 2 h in a chamber containing Ar, N2, and H2 gases along with TiCl4 vapor at a pressure of 2 mbar, for various duty cycles of 33, 50 and 60%. The coatings were characterized by X-ray diffraction, field-emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, hardness, and potentiodynamic polarization. The results indicated that the surface roughness and corrosion rate at the 33% duty cycle were lower than those of the other two cycles. It was also revealed that the finer grains formed at the lower-duty cycles played an important role in lowering the corrosion rate. Also, thin films deposited at lower-duty cycles had higher hardness. The higher chlorine content in the lower-duty cycles did not affect the surface properties of the nanostructured TiN coatings.