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<p>This study investigates the deposition of indium tin oxide (ITO) as a transparent conductive layer on lead zirconate titanate (PZT), quartz crystal resonators (QCR), and quartz glass (QG) using DC sputtering. Optical characterization, performed through UV–VIS spectrophotometry, was coupled with a mathematical model to calculate dielectric constants with a fitting error below 0.006%. X-ray diffraction (XRD) confirmed the preservation of the pure perovskite phase of PZT with a predominant (111) orientation, while SEM and AFM analyses revealed a compact, thin film with a thickness of around 1&#xa0;μm, without any cracks, digs, or exfoliation with a good adherence on surface deposition. EDX analysis related an elemental composition closely to the nominal stoichiometry. The electromechanical impedance (EMI) method demonstrated consistent piezoelectric performance in PZT/Ag, PZT/ITO, QCR/Ag, and QCR/ITO configurations, with minor variations attributed to electrode thickness, temperature fluctuations, and device alignment. The integration of PZT with a transparent conductive layer on ceramic substrates presents a versatile approach for developing interactive displays and touch-sensitive interfaces, offering improved transparency and laying a robust foundation for advancing transparent piezoelectric touch sensors. </p> Graphical Abstract <p></p>

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Integrated structural, optical, and dielectric properties of PZT/ITO thin films for transparent sensor applications

  • 期刊论文

  • 发表日期：

    2025年5月22日

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  • Nicoleta Nedelcu,
  • Fred Harford,
  • Dylan Webb,
  • Cristian Rugină,
  • Ana Maria Mitu,
  • Arcadie Sobetkii

摘要

This study investigates the deposition of indium tin oxide (ITO) as a transparent conductive layer on lead zirconate titanate (PZT), quartz crystal resonators (QCR), and quartz glass (QG) using DC sputtering. Optical characterization, performed through UV–VIS spectrophotometry, was coupled with a mathematical model to calculate dielectric constants with a fitting error below 0.006%. X-ray diffraction (XRD) confirmed the preservation of the pure perovskite phase of PZT with a predominant (111) orientation, while SEM and AFM analyses revealed a compact, thin film with a thickness of around 1 μm, without any cracks, digs, or exfoliation with a good adherence on surface deposition. EDX analysis related an elemental composition closely to the nominal stoichiometry. The electromechanical impedance (EMI) method demonstrated consistent piezoelectric performance in PZT/Ag, PZT/ITO, QCR/Ag, and QCR/ITO configurations, with minor variations attributed to electrode thickness, temperature fluctuations, and device alignment. The integration of PZT with a transparent conductive layer on ceramic substrates presents a versatile approach for developing interactive displays and touch-sensitive interfaces, offering improved transparency and laying a robust foundation for advancing transparent piezoelectric touch sensors.

Graphical Abstract