Numerical simulation analysis and performance study of Kovar alloy/high borosilicate glass welding based on surface oxidation treatment
摘要
Dissimilar material welding has developed rapidly in recent years. Glass-metal bonding has appeared in many fields, such as sensors, semiconductor devices and micro-electromechanical systems. Kovar alloy—boron silicate glass is an often used dissimilar material combination that require joining. The Kovar alloy is pre-oxidized on the surface and then welded with high borosilicate glass, which helps to improve the bonding strength. A three-dimensional finite element model of laser welding of Kovar alloy and high borosilicate glass was established. The effects of laser power and welding speed on the temperature field during welding were studied. The bonding strength was evaluated by shearing force test. The results show that the penetration increases with the increase of power. With the increase of penetration depth, the bonding strength between Kovar alloy and high borosilicate glass is also better. However, with the increase of power, the melting width is also increasing. When the melting width beyond a certain level, the bonding strength between Kovar alloy and high borosilicate glass will decrease. When the power is constant and the speed is changed, it is found that with the increase of speed, the overlap rate between the melting regions of Kovar alloy decreases, and the appropriate overlap rate is beneficial to improve the penetration depth and enhance the bonding strength between glass and metal. Through the stress field analysis, the cracking range of the glass can be roughly determined, and the appropriate welding parameters can be selected to guide. At the same time, the experimental and simulated residual stress results are relatively close, which can explain the accuracy of the experiment to a certain extent. When P = 200W, v = 1mm / s, the shearing force reaches the maximum value of 69N.