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<p>Analytic impedance formulas of cylindrical capacitively coupled plasma (CCP) sources are derived in a moderately high-frequency range. The frequencies considered in this study are assumed to be within a range where the inductance may be non-negligible, but not too high to excite standing waves or inductive heating modes. The solutions to the Bessel differential equation for the electromagnetic fields, derived from Maxwell’s equations and appropriate assumptions, are determined by the Poynting vector and input current conditions. Based on the obtained electromagnetic fields, impedance formulas are derived through field definition, and the results were numerically analyzed.</p>

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A derivation of impedance formula of cylindrical capacitively coupled plasma source in moderately high-frequency range

  • 期刊论文

  • 发表日期：

    2025年6月2日

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  • Nam-Sik Yoon

摘要

Analytic impedance formulas of cylindrical capacitively coupled plasma (CCP) sources are derived in a moderately high-frequency range. The frequencies considered in this study are assumed to be within a range where the inductance may be non-negligible, but not too high to excite standing waves or inductive heating modes. The solutions to the Bessel differential equation for the electromagnetic fields, derived from Maxwell’s equations and appropriate assumptions, are determined by the Poynting vector and input current conditions. Based on the obtained electromagnetic fields, impedance formulas are derived through field definition, and the results were numerically analyzed.