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Comparative analysis of single and triple material 10 nm Tri-gate FinFET

  • Shankhamitra Sunani,
  • Satya Sopan Mahato,
  • Kanjalochan Jena,
  • Raghunandan Swain

摘要

A thorough performance analysis of sub-10 nm gate-length Tri-gate Fin-FETs with gates having single material (SMG) and triple material (TMG) has been conducted through technology computer-aided design (TCAD) simulations for low-power applications. The gate of the TMG device is formed of three metals with distinct work functions. To decrease the drain-induced barrier lowering (DIBL) and increase transconductance, the gate work function near the source is higher than near the drain. The DC and analog/RF are obtained, analyzed, and compared between SMG and TMG devices. It is engrossing that, the device’s OFF current (IOFF) is drastically reduced and the ON current (ION) is improved in the TMG structure leading to a better switching ratio. Also, TMG Tri-gate FinFET device structures provide an excellent peak transconductance of 5.1756 µA/V at VGS = 0.16 V and VDS = 0.1 V, output conductance of 7.45 µA/V at VGS = 1 V, a subthreshold slope of 120 mV/decade at VDS = 0.1 V, an ION/IOFF ratio of 557.12 at VDS = 0.1 V, and DIBL of 33 mV/V. Whereas the SMG Tri-gate FinFET has a peak transconductance of 4.28 µA/V at VGS = 0.4 V and VDS = 0.1 V, output conductance of 5.88 µA/V at VGS = 1 V, a subthreshold slope of 300 mV/decade at VDS = 0.1 V, an ION/IOFF ratio of 21.29 at VDS = 0.1 V, and DIBL of 55 mV/V.