<p>MEMS-based inertial sensors will obtain additional benefits from advancing miniaturization techniques and signal processing methods. Different industries depend heavily on inertial sensors for their operations in automotive safety along with biomedical applications and industrial automation and defence systems. The sensor system contains accelerometers together with gyroscopes which precisely detect motion through linear and angular momentum measurements. MEMS-based sensors have become popular inertial sensors because of their advantages including compact size and low cost together with high sensitivity. The research investigates MEMS inertial sensor operational mechanisms together with component design specifications and distinct groups that consist of capacitive and piezoelectric and piezoresistive and thermal and optical and magnetic configurations. The usage requirements define which sensor type works best because each sensor executes tasks uniquely. This study centres on optimizing the structure of multi-directional inertial sensors through analysis of proof mass elements and suspension beams together with capacitive sensitivity implementation measures. SOI-based MEMS fabrication and bulk micromachining fabrication techniques receive detailed reviews for the purpose of improving sensor performance. The research includes evaluations of displacement analysis and eigenfrequency estimation and capacitive sensitivity optimization. The objective of this research involves developing an improved inertial sensor for motion tracking applications because high-precision needs have become more demanding in robotics and unmanned vehicles and health monitoring systems.</p>