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<p>Advances in precision applications have heightened the demand for 2-degree-of-freedom (DOF) micropositioning mechanisms that offer large ranges and high-precision positioning. However, attaining large-range decoupled motion is still a significant obstacle that reduces positioning accuracy. This paper proposes a compliant XY micropositioning stage powered by piezoelectric actuator to overcome this constraint by allowing for both decoupled platform motion and a broad workspace. The design incorporates a three-stage amplification mechanism for high displacement gain and a symmetric X–Y layout to ensure uniform bidirectional performance. Further, four leaf parallelograms and two guiding mechanisms are incorporated into the compliant mechanism to reduce parasitic motions. The static model is established using the compliance-based matrix method (CMM) and is subsequently optimized based on this model, and the natural frequency is determined using Lagrange’s principle. These analytical results are validated through finite element analysis (FEA). The combined results confirm that the proposed micropositioner achieves a large amplification ratio of 54.59, which ensures a significant workspace. Furthermore, the micropositioner exhibits good performances in terms of decoupled motion and natural frequency-demonstrating its potential for large-range, high-precision positioning applications.</p>

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Design and Optimization of a High-Amplification 2-DOF Micropositioner with Decoupled Planar Motion

  • 期刊论文

  • 发表日期：

    2026年5月19日

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  • Tasawar Sudman Ahmed,
  • Tilok Kumar Das,
  • Bijan Shirinzadeh

摘要

Advances in precision applications have heightened the demand for 2-degree-of-freedom (DOF) micropositioning mechanisms that offer large ranges and high-precision positioning. However, attaining large-range decoupled motion is still a significant obstacle that reduces positioning accuracy. This paper proposes a compliant XY micropositioning stage powered by piezoelectric actuator to overcome this constraint by allowing for both decoupled platform motion and a broad workspace. The design incorporates a three-stage amplification mechanism for high displacement gain and a symmetric X–Y layout to ensure uniform bidirectional performance. Further, four leaf parallelograms and two guiding mechanisms are incorporated into the compliant mechanism to reduce parasitic motions. The static model is established using the compliance-based matrix method (CMM) and is subsequently optimized based on this model, and the natural frequency is determined using Lagrange’s principle. These analytical results are validated through finite element analysis (FEA). The combined results confirm that the proposed micropositioner achieves a large amplification ratio of 54.59, which ensures a significant workspace. Furthermore, the micropositioner exhibits good performances in terms of decoupled motion and natural frequency-demonstrating its potential for large-range, high-precision positioning applications.