Corrosion Behaviors and Mechanical Properties of FeCoCrNiCux High-Entropy Alloy Films Fabricated by Magnetron Sputtering at Different Cu Target Powers
摘要
In order to study the effect of Cu on the microstructure, corrosion behaviors and mechanical properties of high-entropy alloy films, FeCoCrNiCux films were deposited by magnetron sputtering at different Cu target powers. The results show that all films consisted of a single FCC phase with a columnar structure, whereas the lattice constant and grain size increased with the increasing Cu content. Meanwhile, the surface quality was improved first and then deteriorated. As a result, the hardness of FeCoCrNiCux films increased as the Cu content increased, while the adhesive strength first increased and then decreased. Moreover, although the addition of Cu was detrimental to the corrosion resistance, FeCoCrNiCux films could effectively prevent 304 stainless steel from further corrosion. Therefore, the FeCoCrNiCux film deposited at 3 W exhibited the best excellent comprehensive performance.