A linear variable optical filter for the mid-infrared spectrum
摘要
This work details the design and simulation of a linear variable optical filter (LVOF) that has been optimized for the mid-infrared (MIR) spectrum, specifically within the range of 2500–5500 nm. The filter employs a silicon substrate and a distributed Bragg reflector (DBR) architecture composed of Si, Ge, and SiO2 thin-film layers, incorporating a laterally tapered SiO2 cavity to achieve continuous wavelength tuning. The implementation of high-contrast Si/SiO2 and Ge/SiO2 layer pairs enables broad spectral coverage with a reduced number of DBR periods while maintaining high reflectivity. Simulations demonstrate transmission exceeding 90%, cut-off depth below 0.1%, and spectral resolution between 0.6 and 5%. The proposed structure provides multichannel filtering capability using a monolithic design, enabling compact, low-cost MIR detection systems suitable for gas-sensing applications.