Comparing Langmuir probe data and the calculations with optical properties of argon discharge at low pressure

In plasma physics, mathematical models are very important in determining the discharge behavior. In this research paper, the physical properties of capacitively coupled radio frequency discharges at low pressure are determined by two methods which are Langmuir probe and OPSIAL software using optical emission spectroscopy data. In addition, the mechanical pump is used to form the mechanically forced discharge region, and the forced region is investigated with these methods. Finally, we report the studies on plasma parameters such as electron density and electron temperature. The particle-in-cell method is used for the simulation studies. When OPSIAL calculations and Langmuir data are compared, it is seen that there are some differences between them, but there is a change in the same direction.