Research on Material Outgassing Measurement System with an In-Situ Calibration
摘要
To ensure the accuracy of output data, it is essential to calibrate the material outgassing test device regularly. This study first established a set of micro-flow intake systems based on the new standard leak element and then researched an in-situ calibration method for the outgassing system. High-purity nitrogen, argon, and helium were introduced through the micro-flow intake system to the outgassing system to calibrate the vacuum gauge, Quadrupole Mass Spectrometer (QMS), and outgassing amount online. The calibration pressure for the gauge ranged from 10–4 to 10–2 Pa, while that for QMS was between 10–4 and 10–3 Pa. The calibration range of outgassing amount varied among 10–6 Pa m3/s, 10–5 Pa m3/s and 10–4 Pa m3/s. The results showed good linearity and repeatability in calibrations of gauge and outgassing amounts. Additionally, sensitivities, pressure and outgassing correction factors were obtained for each gas type. It was found that the correction factor of pressure is consistent with that of outgassing; moreover, sensitivities of separation gauge and QMS depended on gas type, leading to different correction factors and sensitivities for each gas. Using this in-situ calibrated outgassing system enabled measurement of electron-induced outgassing characteristics of polymethyl methacrylate. The results demonstrate the operability and traceability of the material outgassing test system with in-situ calibration used in the study.