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<p>This study investigates the structural and optical properties of zinc oxide (ZnO) thin films deposited on porous silicon (PSi) substrates using three different fabrication techniques: radio frequency (RF) sputtering, sol–gel spin coating, and thermal evaporation. Characterization was performed using X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and photoluminescence (PL) spectroscopy. All ZnO/PSi samples exhibited high-quality polycrystalline films with low defect densities. Among the methods used, the RF sputtering technique achieved the best electrochemical performance. The maximum current density (Jmax) and Michaelis–Menten constant (K_M) were found to be 570 μA and 680&#xa0;μM (0.68&#xa0;mM), respectively, demonstrating efficient enzyme immobilisation on the ZnO/PSi electrode surface and a strong affinity between the immobilised glucose (GOx) molecules and glucose molecules. Furthermore, the glucose biosensor demonstrated moderate sensitivity over the linear detection range (500&#xa0;μM to 2000&#xa0;μM), with a linear range slope (LRS) of 40 μA/cm<sup>2</sup>/μM, and a correlation coefficient (R<sup>2</sup>) of 0.9543.</p>

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Fabrication and Characterisation of Zinc Oxide (ZnO) Grown on Porous Silicon (PSi) Substrate Using Different Techniques for Glucose Biosensor

  • 期刊论文

  • 发表日期：

    2025年12月9日

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  • A. Sh. Hussein,
  • Fatima Salem Obaid Al Jasmi,
  • Mohammed H. Jawad,
  • Mohanad Q. Fahem

摘要

This study investigates the structural and optical properties of zinc oxide (ZnO) thin films deposited on porous silicon (PSi) substrates using three different fabrication techniques: radio frequency (RF) sputtering, sol–gel spin coating, and thermal evaporation. Characterization was performed using X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and photoluminescence (PL) spectroscopy. All ZnO/PSi samples exhibited high-quality polycrystalline films with low defect densities. Among the methods used, the RF sputtering technique achieved the best electrochemical performance. The maximum current density (Jmax) and Michaelis–Menten constant (K_M) were found to be 570 μA and 680 μM (0.68 mM), respectively, demonstrating efficient enzyme immobilisation on the ZnO/PSi electrode surface and a strong affinity between the immobilised glucose (GOx) molecules and glucose molecules. Furthermore, the glucose biosensor demonstrated moderate sensitivity over the linear detection range (500 μM to 2000 μM), with a linear range slope (LRS) of 40 μA/cm2/μM, and a correlation coefficient (R2) of 0.9543.