Composite bands anti-reflection micro-nano structure surface based on guided mode resonance breaking sub-wavelength conditions
摘要
The anti-reflection microstructure surface presents unparalleled advantages in the realm of wide-angle and wide-spectrum anti-reflection. However, the traditional antireflection micro nano structure units need to meet the sub-wavelength conditions, which brings challenges to the manufacturing of cross spectral anti-reflection micro-nano structure units. This paper presents a novel composite bands anti-reflection micro-nano structure surface utilizing guided mode resonance, which break the sub-wavelength conditions. The proposed structure exhibits a low structural depth-to-width ratio of 2.015 and a significant periodicity (Λ = 1.3 μm). In order to achieve the design and optimization of composite band micro nano structures, rigorous coupled-wave analysis was used to analyze and compare the structures. It achieves a wide spectral average transmittance exceeding 96% in the mid-infrared band. Additionally, it enables zero-order transmission enhancement in the 1550 nm and 1064 nm laser communication bands. Furthermore, non-zero diffraction orders remain below 1%, facilitating diffraction suppression in the short-wave laser band. Moreover, it demonstrates low sensitivity to TE and TM polarization incidences, thereby minimizing their influence on performance. Considering the possible deviations in manufacturing precision during the actual preparation process, a tolerance analysis was conducted. This study holds the potential to advance the utilization of anti-reflective microstructure surfaces within the realm of laser communication.