A simulation design of cantilever beam type Microforce detection sensor based on photoelectric position sensitive detector (PSD)
摘要
This simulation study presents a design for a microforce detection sensor that leverages a photoelectric position sensitive detector. By integrating advanced optical systems and meticulous electronic signal processing techniques, we achieve precise and stable microforce detection. The design incorporates a silicon cantilever beam, illuminated by a laser, which serves as the force reception element. The slight deflections of the cantilever beam, in conjunction with meticulous optical path design and photoelectric conversion, enable sensitive detection of very small forces. Changes in the cantilever beam’s deflection alter the reflected optical path, thereby causing shifts in the light spot on the photoelectric position sensitive detectors. The analysis of these shifts allows for an accurate estimation of the microforce exerted on the cantilever beam. Following the completion of a finite element analysis of the cantilever beam deflection, Zemax software was employed for the purpose of conducting a simulation analysis of the sensor’s optical system. This analysis enabled the determination of the parameters required for the optical path design, including the positions and angles of the laser, reflecting mirror, focusing lens, and photoelectric position sensitive detector. The simulation outcomes demonstrate that this microforce detection sensor can achieve a high measurement accuracy of 0.012%, meeting the demands for precision microforce measurement. Furthermore, the precise light spot position detection provides solid data support for microforce measurement, thereby lending support to the design’s soundness. Finally, by conducting error and accuracy analysis across different simulation scenarios (Simulation 1, 2, and 3), the efficacy and stability of the sensor design can be further validated.