Study of the optical properties of aluminum films and the effect of current frequency on plasma parameters

Optical emission spectroscopy and image analysis for light within plasma were used to explore the influence of AC frequency on the properties of plasma that created by dielectric barrier discharge Aluminium (Al) at atmospheric pressure, the prepared Aluminium films with 1 μm thickness, the electron's density was calculated based on the Stark broadening method, and the electron's temperature (Te) was calculated using the Boltzmann plot. With rising AC frequency, the electron number density (n_e), electron temperature, and plasma frequency (ω_pe) all increased. While increasing AC frequency led to decreased the Debye length (λ_D).