Uncertainty assessment in the calibration of an auto-compensated laser interferometer system

Industrial sectors rely heavily on interferometric technique for manufacturing and production. This technique is also commonly utilized for object characterization, investigation, and testing. This work’s goal is to provide a broad review of the state-of-the-art in laser interferometer systems calibration, including a theoretical background measurement of length, as a power technique widely used in industry for direct precision measurement of length and displacement. The essential calibration of laser interferometers at regular intervals ensures the traceability of the measurement chain to the absolute unit of length standard, the meter. The mathematical model equation and measurement method that form the foundation of the uncertainty assessment are explained. The uncertainty assessment is carried out according to JCGM 100:2008-Evaluation of Measurement Data-Guide to the Expression of Uncertainty in Measurement (GUM).