Scholarlink

<p>Designing compliant mechanisms in a principled and systematic framework presents a significant challenge. To tackle this challenge, a detailed method is put forth for the development of a novel large-stroke compliant XY micro-positioning stage. Firstly, a bridge-lever-half-bridge displacement amplification mechanism (DAM) is designed by using the three-stage amplification scheme. Then an XY decoupling stage with low input stiffness is designed based on the freedom and constraint topology method (FACT). By combining the bridge-lever-half-bridge mechanism with the XY decoupling stage, the compliant XY micro-positioning stage is constructed. Subsequently, based on the dynamic stiffness matrix modeling method, the dynamic and static unified modeling is performed to obtain its dynamic and static performance parameters simultaneously. After that, the optimal parameters are determined by the genetic algorithm (GA). Finally, compared with the experimental results, the errors of dynamic modeling and static modeling are within 5% and 4%, respectively. The stroke is 180.8&#xa0;μm × 178&#xa0;μm and the first two-order natural frequencies are 103.5&#xa0;Hz and 104.5&#xa0;Hz. It provides a reference for the theoretical design of compliant mechanisms.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Development of a Novel Compliant Decoupled Large-Stroke XY Micro- Positioning Stage Based on the Freedom and Constraint Topology

  • 期刊论文

  • 发表日期：

    2026年4月16日

查看全文
  • Yunsong Du,
  • Tianbao Pan

摘要

Designing compliant mechanisms in a principled and systematic framework presents a significant challenge. To tackle this challenge, a detailed method is put forth for the development of a novel large-stroke compliant XY micro-positioning stage. Firstly, a bridge-lever-half-bridge displacement amplification mechanism (DAM) is designed by using the three-stage amplification scheme. Then an XY decoupling stage with low input stiffness is designed based on the freedom and constraint topology method (FACT). By combining the bridge-lever-half-bridge mechanism with the XY decoupling stage, the compliant XY micro-positioning stage is constructed. Subsequently, based on the dynamic stiffness matrix modeling method, the dynamic and static unified modeling is performed to obtain its dynamic and static performance parameters simultaneously. After that, the optimal parameters are determined by the genetic algorithm (GA). Finally, compared with the experimental results, the errors of dynamic modeling and static modeling are within 5% and 4%, respectively. The stroke is 180.8 μm × 178 μm and the first two-order natural frequencies are 103.5 Hz and 104.5 Hz. It provides a reference for the theoretical design of compliant mechanisms.