Scholarlink

<p>The development of flexure-based XYZ micro-positioning stages incorporating a novel type of flexure hinges with elliptical transverse cross-sections (ETC) is presented. In comparison to classical two-axis flexure hinges featuring rectangular transverse cross-sections (RTC), parametric studies of both the flexure hinges and the flexure stage were conducted, focusing on stress concentration, motion range, and output decoupling. The results demonstrate that the ETC-based XYZ flexure stage outperforms the RTC-based design in all three aspects. A prototype of the XYZ flexure stage utilizing ETC-type two-axis flexure hinges was developed and experimentally tested, achieving motion errors and parasitic motions of less than 5%. The ETC-type two-axis flexure hinges offer a novel approach for advancing spatial flexure stage design.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Development of XYZ flexure micro-positioning stages based on ETC type two-axis flexure hinges

  • 期刊论文

  • 发表日期：

    2025年8月4日

查看全文
  • Junqiang Chen,
  • Zehui Zhong,
  • Huaxian Wei,
  • Xiaodong Niu

摘要

The development of flexure-based XYZ micro-positioning stages incorporating a novel type of flexure hinges with elliptical transverse cross-sections (ETC) is presented. In comparison to classical two-axis flexure hinges featuring rectangular transverse cross-sections (RTC), parametric studies of both the flexure hinges and the flexure stage were conducted, focusing on stress concentration, motion range, and output decoupling. The results demonstrate that the ETC-based XYZ flexure stage outperforms the RTC-based design in all three aspects. A prototype of the XYZ flexure stage utilizing ETC-type two-axis flexure hinges was developed and experimentally tested, achieving motion errors and parasitic motions of less than 5%. The ETC-type two-axis flexure hinges offer a novel approach for advancing spatial flexure stage design.