<p>Recently, there has been increasing demand for LiDAR sensors capable of precise short-range distance measurement in robotics and industrial automation. Applications such as robotic control and obstacle avoidance require real-time distance acquisition with millimeterlevel accuracy. Conventional time-of-flight (ToF) methods are limited in near-field measurement and are sensitive to environmental disturbances. In contrast, frequency-modulated continuous wave (FMCW) LiDAR provides robust performance using interference-based signal processing. In FMCW LiDAR, distance resolution depends on the accuracy of beat frequency estimation between reference and reflected beams. Although the fast Fourier transform (FFT) is widely used, its resolution is fundamentally limited by acquisition time. To overcome this limitation, a hybrid frequency estimation method combining DFT-based coarse estimation and chirp z-transform (CZT)-based refinement is proposed. DFT is first used to locate the approximate frequency peak, and CZT is then applied within a narrow frequency range to achieve higher resolution without increasing acquisition time. The proposed method achieves 100 Hz frequency resolution, representing a 50-fold improvement over conventional FFT (5 kHz). This approach effectively balances speed and accuracy, making it suitable for high-resolution short-range FMCW LiDAR applications.</p>