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<p>An infrared absorption-based flow sensor has been created to precisely measure the output from dispensers utilized in electronic packaging. The sensor works by heating a local spot on the epoxy-supplying tube using a laser, which thermally tags the epoxy. The velocity and discharge time of the epoxy are then measured using pairs of light-emitting diodes and photodetectors to determine the discharge quantity. The range of the measured dispenser discharge volume was from 2.87 mg to 21.69 mg, measured within the range used in actual semiconductor processes. The maximum deviation from the scale measurement was 2.6 %, and the maximum measurement uncertainty was 6.8 %. This demonstrates, for the first time, that the infrared absorption-based sensor can precisely measure the dispenser’s discharge quantity in situ. Additionally, the sensor can monitor the discharge during the dispensing process and can be utilized as a feedback mechanism for the accurate control of the discharge quantity.</p>

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Infrared thermal tagging sensor for epoxy discharge measurement in semiconductor fabrication dispensers

  • 期刊论文

  • 发表日期：

    2026年5月11日

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  • Seok Hwan Lee,
  • Woong Kang,
  • Sunghyuk Im

摘要

An infrared absorption-based flow sensor has been created to precisely measure the output from dispensers utilized in electronic packaging. The sensor works by heating a local spot on the epoxy-supplying tube using a laser, which thermally tags the epoxy. The velocity and discharge time of the epoxy are then measured using pairs of light-emitting diodes and photodetectors to determine the discharge quantity. The range of the measured dispenser discharge volume was from 2.87 mg to 21.69 mg, measured within the range used in actual semiconductor processes. The maximum deviation from the scale measurement was 2.6 %, and the maximum measurement uncertainty was 6.8 %. This demonstrates, for the first time, that the infrared absorption-based sensor can precisely measure the dispenser’s discharge quantity in situ. Additionally, the sensor can monitor the discharge during the dispensing process and can be utilized as a feedback mechanism for the accurate control of the discharge quantity.