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<p>The corrugated diaphragm and silicone oil are critical components of oil-filled pressure sensors, significantly influencing their performance characteristics. This study employs COMSOL software for finite element simulation to assess the mechanical behavior of semi-circular arc corrugated diaphragms with varying numbers of corrugations, depths, and thicknesses under loads ranging from 0.1 MPa to 0.8 MPa. Additionally, the impact of thermal expansion due to different amounts of silicone oil filling on the closed cavity of the pressure sensor is investigated. Two sensor samples were fabricated for experimental testing, and their output performance was evaluated at various temperatures. The results indicate that the amount of silicone oil filling markedly affects the sensor’s temperature drift and sensitivity. Notably, the second sample, equipped with a ceramic insulation cover, demonstrates superior performance under high-temperature conditions, exhibiting lower nonlinearity, hysteresis, and enhanced repeatability compared to the first sample, which utilizes an insulating cover. Therefore, the judicious control of silicone oil filling and the optimization of diaphragm structural design are crucial for enhancing pressure sensor performance in extreme environments, providing a valuable empirical foundation for the future design of isolated oil-filled sensor.</p>

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Research on key factors for optimizing packaging performance of oil-filled pressure sensors

  • 期刊论文

  • 发表日期：

    2026年1月8日

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  • Lijun Yang,
  • Shubin Zhang,
  • Fanjiang Kou,
  • Ziqi Liu,
  • Linpeng Xu,
  • Jianwu Shen,
  • Xuemin Wang

摘要

The corrugated diaphragm and silicone oil are critical components of oil-filled pressure sensors, significantly influencing their performance characteristics. This study employs COMSOL software for finite element simulation to assess the mechanical behavior of semi-circular arc corrugated diaphragms with varying numbers of corrugations, depths, and thicknesses under loads ranging from 0.1 MPa to 0.8 MPa. Additionally, the impact of thermal expansion due to different amounts of silicone oil filling on the closed cavity of the pressure sensor is investigated. Two sensor samples were fabricated for experimental testing, and their output performance was evaluated at various temperatures. The results indicate that the amount of silicone oil filling markedly affects the sensor’s temperature drift and sensitivity. Notably, the second sample, equipped with a ceramic insulation cover, demonstrates superior performance under high-temperature conditions, exhibiting lower nonlinearity, hysteresis, and enhanced repeatability compared to the first sample, which utilizes an insulating cover. Therefore, the judicious control of silicone oil filling and the optimization of diaphragm structural design are crucial for enhancing pressure sensor performance in extreme environments, providing a valuable empirical foundation for the future design of isolated oil-filled sensor.