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<p>The XY-stage is a critical component in precision engineering, with applications found in optical alignment processes, scanning probe microscopy, semiconductor manufacturing, and ultraprecision machining. This study presents experimental results of a piezoelectric XY-axis stage incorporating diamond-type displacement amplification mechanisms (DDAMs). The DDAM design offers a comparatively large operational range and higher stiffness compared to conventional lever-type mechanisms. Experimental analysis demonstrated displacements of 9.58 and 14.33 µm under an applied voltage of 51 V, corresponding to displacement amplification ratios of 1.76 and 2.63, respectively. The stage achieved a minimum step motion of 0.01 µm and demonstrated resonant frequencies of 560 and 730 Hz along the X- and Y-axes, respectively. These results highlight the static and dynamic characteristics of the system. Future work will focus on implementing a suitable control system for precision positioning and evaluating the stage’s examination in practical applications.</p>

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Piezoelectric XY-stage with diamond-type displacement amplification mechanism

  • 期刊论文

  • 发表日期：

    2025年12月10日

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  • Yung-Tien Liu

摘要

The XY-stage is a critical component in precision engineering, with applications found in optical alignment processes, scanning probe microscopy, semiconductor manufacturing, and ultraprecision machining. This study presents experimental results of a piezoelectric XY-axis stage incorporating diamond-type displacement amplification mechanisms (DDAMs). The DDAM design offers a comparatively large operational range and higher stiffness compared to conventional lever-type mechanisms. Experimental analysis demonstrated displacements of 9.58 and 14.33 µm under an applied voltage of 51 V, corresponding to displacement amplification ratios of 1.76 and 2.63, respectively. The stage achieved a minimum step motion of 0.01 µm and demonstrated resonant frequencies of 560 and 730 Hz along the X- and Y-axes, respectively. These results highlight the static and dynamic characteristics of the system. Future work will focus on implementing a suitable control system for precision positioning and evaluating the stage’s examination in practical applications.