Design and dynamic analysis of a novel six-DOF flexure-based compliant stage for micro-vibration

Flexure-based compliant mechanisms exhibit many attractive features for microvibration study, which have not been fully explored in previous research. In this study, a novel 3-PPRS flexure-based compliant stage with six-DOF is designed to generate micro-vibrations. This stage is actuated through three XY compliant-driven mechanisms, which have the advantage of no coupling effects between the vertical and horizontal motions of the stage. To analyze its dynamic behaviors, a new dynamic stiffness modeling method is proposed. This approach can be used to the modeling and analysis of general spatial compliant mechanisms. Subsequently, the derived dynamic characteristics are compared and verified by finite element method. This method can broaden the types of micro-vibration simulators and provide additional references for the dynamic analysis of spatial flexure-based compliant mechanisms.