Experimental investigation into ultrasonic micro machining for fabrication of micro channels on Quartz

Ultrasonic micro machining (USMM) process has the ability to produce micro channels on quartz materials. Fabrication of multiple micro channels on quartz is a challenging task due to brittleness of quartz. Among various materials, quartz is an attractive material for research interest because it is used for various bio-chemical and bio-medical applications. The developed multiple tips micro tool was used to fabricate multiple micro channels on quartz by micro USM process so that total machining time can be reduced and hence productivity can be enhanced. In the present research work, the effects of micro USM process parameters like power rating, abrasive slurry concentration, tool feed rate and slurry flow rate on width overcut, taper angle and surface roughness of micro channel were analyzed during fabrication of multiple micro channels on quartz.