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<p>Piezoelectric materials for sensors and MEMS must exhibit a high piezoelectric constant, low dielectric loss, and excellent thermal and mechanical stability. The ZnO/PZT composite emerges as a promising candidate for advanced piezoelectric sensors and MEMS applications. However, mismatched thermal expansion coefficients (CTE) and potential chemical incompatibilities between PZT and ZnO present significant challenges in designing this composite material. This study aims to optimize a ZnO/PZT composition gradient to overcome these challenges by enhancing acoustic impedance matching, reducing wave reflection, and maximizing piezoelectric efficiency. A comprehensive analysis was conducted on an FGPM (ZnO/PZT-5H) plate, revealing that the optimal gradient configuration depends on the application: for ultrasonic sensing and high-frequency MEMS, a ZnO → PZT gradient is preferable, as it minimizes reflection and improves wave transmission. For actuators requiring a strong piezoelectric response, a PZT → ZnO gradient may be more advantageous. These findings highlight the importance of tailoring the composition gradient to optimize performance for specific piezoelectric applications.</p>

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In-depth analysis of the FGPM (ZnO/PZT) material for the development of the MEMS piezoelectric sensor

  • 期刊论文

  • 发表日期：

    2026年3月27日

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  • Mohamed Shili Bouhdima

摘要

Piezoelectric materials for sensors and MEMS must exhibit a high piezoelectric constant, low dielectric loss, and excellent thermal and mechanical stability. The ZnO/PZT composite emerges as a promising candidate for advanced piezoelectric sensors and MEMS applications. However, mismatched thermal expansion coefficients (CTE) and potential chemical incompatibilities between PZT and ZnO present significant challenges in designing this composite material. This study aims to optimize a ZnO/PZT composition gradient to overcome these challenges by enhancing acoustic impedance matching, reducing wave reflection, and maximizing piezoelectric efficiency. A comprehensive analysis was conducted on an FGPM (ZnO/PZT-5H) plate, revealing that the optimal gradient configuration depends on the application: for ultrasonic sensing and high-frequency MEMS, a ZnO → PZT gradient is preferable, as it minimizes reflection and improves wave transmission. For actuators requiring a strong piezoelectric response, a PZT → ZnO gradient may be more advantageous. These findings highlight the importance of tailoring the composition gradient to optimize performance for specific piezoelectric applications.