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Gas-sensing performance of WS2/WO3 binary thin films for methane and hydrogen detection

  • R Salamatizadeh,
  • M Adelifard,
  • S A Ketabi

摘要

This study presents the synthesis and characterization of WS2/WO3 binary thin films with varying sulphur to tungsten (S/W) molar ratios ([S]/[W] = 6 and 18 at%) for gas-sensing applications. The films were obtained by annealing sprayed layers in a sulphur atmosphere. The structural, morphological, optical, electrical and gas-sensing properties of the films were investigated. X-ray diffraction analysis revealed that the as-deposited films exhibited an amorphous nature, while annealing in a sulphur atmosphere resulted in the formation of a mixed-phase WS2/WO3 structure. Surface morphology studies showed changes associated with the sulphur concentration in the spray solution. Electrical characterization indicated p-type conductivity for all films, with a decrease in electrical resistivity as the sulphur-to-tungsten molar ratio increased. Gas-sensing experiments were performed to evaluate the detection of methane (CH4) and hydrogen (H2) gases. The pressure changes of 1.5 and 12.37 kPa were taken into account for methane gas and hydrogen gas, respectively. These pressure changes are equivalent to a concentration of 10 ppm for each gas. The WS2/WO3 films exhibited high sensitivity, with the highest values observed at approximately 70% for CH4 and 85% for H2 gases. Overall, the successful synthesis and characterization of WS2/WO3 binary thin films with tunable properties and superior gas-sensing performance suggest their potential for various gas-sensing applications.