Low-temperature growth of MoSe₂ and WSe₂ nanostructures on flexible Mo and W metal foils

Here, we have grown crystalline MoSe₂ and WSe₂ nanostructures on thin flexible Mo and W metal foils at growth temperature of 450–550°C by using the single-zone atmospheric pressure chemical vapour deposition (CVD) method. Raman spectroscopy measurements confirm the structural formation with low line widths for MoSe₂ on Mo foil at 450°C and WSe₂ on W foil at 550°C corresponding to their optical vibrational Raman modes. X-ray diffraction (XRD) patterns show the hexagonal 2H phase of grown MoSe₂ and WSe₂ nanostructures attributed to their distinguished XRD peaks. The field emission scanning electron microscopy revealed the granular-layered MoSe₂ surface, whereas the nano-woolforest type surface of WSe₂ film. Elemental analysis using energy-dispersive X-ray spectroscopy technique confirms the formation of nearly stoichiometry MoSe₂ and WSe₂ compounds. Chemical composition and binding energy values of deposited films were studied by using X-ray photoelectron spectroscopy. Growth of polycrystalline and large-area MoSe₂ and WSe₂ film on flexible metal foils using scalable and low-cost CVD system paves the way for the fabrication of futuristic flexible energy devices on metal foils.