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<p>MEMS switching devices are widely employed in radio-frequency (RF) and telecommunications systems due to their low insertion loss, high isolation, and scalability. Several RF MEMS switching configurations are available to achieve stable switching behavior. Cantilever beams are used for their reliable actuation. The performance of the cantilever MEMS switch depends on stiffness, resonance, stress limits, and operating pull-in voltage. In this paper, analytical beam modeling is combined with finite element simulations to determine the influence of beam dimensions on the mechanical response. A variable-width cantilever design is proposed to lower the actuation voltage while maintaining structural stability. The optimized device achieves a pull-in voltage of 9.8&#xa0;V, a spring constant of 2.1&#xa0;N/m, a resonance frequency of 19.2&#xa0;kHz, and a maximum stress of 22.7&#xa0;MPa. The results demonstrate that the proposed geometry can enable controlled tuning of resonance through modification of the effective stiffness mass distribution, enabling low-voltage actuation without sacrificing robustness. The pull-in voltage reduction is achieved through redistribution of beam stiffness and capacitance in the stepped geometry. The proposed stepped cantilever design provides practical design guidelines for low-power and reliable MEMS switches in future electronic and RF switching systems.</p> Graphical Abstract <p></p>

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Graphene micro-cantilever MEMS switch: multiscale modeling and design for reduced pull-in voltage

  • 期刊论文

  • 发表日期：

    2026年4月19日

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  • Meetu Nag

摘要

MEMS switching devices are widely employed in radio-frequency (RF) and telecommunications systems due to their low insertion loss, high isolation, and scalability. Several RF MEMS switching configurations are available to achieve stable switching behavior. Cantilever beams are used for their reliable actuation. The performance of the cantilever MEMS switch depends on stiffness, resonance, stress limits, and operating pull-in voltage. In this paper, analytical beam modeling is combined with finite element simulations to determine the influence of beam dimensions on the mechanical response. A variable-width cantilever design is proposed to lower the actuation voltage while maintaining structural stability. The optimized device achieves a pull-in voltage of 9.8 V, a spring constant of 2.1 N/m, a resonance frequency of 19.2 kHz, and a maximum stress of 22.7 MPa. The results demonstrate that the proposed geometry can enable controlled tuning of resonance through modification of the effective stiffness mass distribution, enabling low-voltage actuation without sacrificing robustness. The pull-in voltage reduction is achieved through redistribution of beam stiffness and capacitance in the stepped geometry. The proposed stepped cantilever design provides practical design guidelines for low-power and reliable MEMS switches in future electronic and RF switching systems.

Graphical Abstract