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<p>The design, modeling, and investigation of a novel pull-in-free MEMS capacitive accelerometer designed specifically for low-frequency vibration monitoring in concrete structures are presented in this paper. The sensor’s dual layer interdigitated comb drive configuration and folded beam suspension are designed to enhance displacement sensitivity, mechanical stability, and capacitance linearity. The proposed device functions in a completely passive mode, in contrast to traditional electrostatically actuated MEMS switches. Pull-in instability is effectively eliminated by its lateral in-plane sensing geometry. Finite element method (FEM) simulations with the IntelliSuite MEMS CAD tool facilitate analytical modeling of displacement response, natural frequency and mechanical stiffness. The sensor closely matches the design target of 100&#xa0;Hz with a natural frequency of 97.97&#xa0;Hz and a displacement sensitivity of 24.07&#xa0;μm/g. Furthermore, the structure produces a low noise level of 0.96&#xa0;µg/√Hz and a voltage sensitivity of 1.89&#xa0;V/g/V due to its rest capacitance of 1.74 pF and capacitance variation of 7.06 pF/g. For precision low-frequency structural health monitoring (SHM) in civil infrastructure applications, the device is a reliable, robust alternative due to its high linearity, low hysteresis and minimal cross-axis sensitivity. The design offers a reliable substitute for long-term deployment by overcoming the limitations of pull-in affected electrostatically actuated MEMS devices documented in previous studies.</p> Graphical Abstract <p></p>

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Low frequency design of high-performance MEMS based comb drive folded beam type capacitive accelerometers for structural health monitoring of concrete structures

  • 期刊论文

  • 发表日期：

    2025年9月2日

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  • S. Kavitha,
  • S. Rajakumar

摘要

The design, modeling, and investigation of a novel pull-in-free MEMS capacitive accelerometer designed specifically for low-frequency vibration monitoring in concrete structures are presented in this paper. The sensor’s dual layer interdigitated comb drive configuration and folded beam suspension are designed to enhance displacement sensitivity, mechanical stability, and capacitance linearity. The proposed device functions in a completely passive mode, in contrast to traditional electrostatically actuated MEMS switches. Pull-in instability is effectively eliminated by its lateral in-plane sensing geometry. Finite element method (FEM) simulations with the IntelliSuite MEMS CAD tool facilitate analytical modeling of displacement response, natural frequency and mechanical stiffness. The sensor closely matches the design target of 100 Hz with a natural frequency of 97.97 Hz and a displacement sensitivity of 24.07 μm/g. Furthermore, the structure produces a low noise level of 0.96 µg/√Hz and a voltage sensitivity of 1.89 V/g/V due to its rest capacitance of 1.74 pF and capacitance variation of 7.06 pF/g. For precision low-frequency structural health monitoring (SHM) in civil infrastructure applications, the device is a reliable, robust alternative due to its high linearity, low hysteresis and minimal cross-axis sensitivity. The design offers a reliable substitute for long-term deployment by overcoming the limitations of pull-in affected electrostatically actuated MEMS devices documented in previous studies.

Graphical Abstract