Design and microfabrication techniques using laser machining for XYθ stage compliant mechanisms in precision positioning systems

High precision motion is performed in several applications using micro/nano positioning stages with compliant mechanisms. Researchers have put out a number of techniques in recent years to accomplish the compliant mechanism. In this work, a parametrization technique-based design for an XYθ micro positioning stage is presented. Utilizing a mix of four straightforward bars, the conceptual design of the placement stage is created. For angular movement of one side, a single load may be applied; for linear displacement, a double load may be applied. The displacement depends on the direction, the stage’s four sides may hold weights of varying sizes. A method called parameterization turns conceptual design into a practical model by establishing geometrical parameters. To evaluate x, y, and θ, simulations are carried out for each load with double loading. The laser machining technique was used to build a solid model, which was then examined for both real-world and numerical results.