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<p>The deposition uniformity of diamond-like carbon (DLC) composite film on mechanical component surfaces serves as a critical quality indicator for the process. This study focuses on cylindrical gears. It uses the FEM-PIC/MCC algorithm to simulate the behavior of deposited ions around gear surfaces. These simulations are part of plasma immersion ion implantation and deposition (PIII&amp;D) systems. In this paper, a fast localization algorithm is proposed to implement the FEM-PIC/MCC method for refined plasma modeling of complex surfaces. The model was validated using comprehensive plasma diagnostics and DLC film deposition experiments. The effects of bias voltage on implantation flux, energy, and angle were systematically investigated. Key findings include that electrons establish the initial sheath structure through rapid response, followed by periodic oscillations, while ions dominate the subsequent sheath evolution through inertial motion. Increasing the bias voltage significantly enhances surface ion implantation flux and energy but compromises uniformity of ion implantation flux and increases implantation angles on tooth flanks. DLC composite films were deposited on polished silicon substrates. The films exhibited a non-uniform thickness distribution along the gear tooth profiles. Flank regions showed higher structural ordering and lower defect density. This study elucidates the spatial distribution and dynamic evolution of plasma near complex curved surfaces during PIII&amp;D.</p>

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From Plasma to Film: FEM-PIC/MCC Modeling, Diagnostic Experiments, and Film Characterization of DLC-Coated Gears

  • 期刊论文

  • 发表日期：

    2026年5月4日

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  • Xiaocheng Shen,
  • Tingting Jiang,
  • Jinyuan Tang,
  • Jiangping Zhu,
  • Yihao Ling,
  • Yelin Zeng

摘要

The deposition uniformity of diamond-like carbon (DLC) composite film on mechanical component surfaces serves as a critical quality indicator for the process. This study focuses on cylindrical gears. It uses the FEM-PIC/MCC algorithm to simulate the behavior of deposited ions around gear surfaces. These simulations are part of plasma immersion ion implantation and deposition (PIII&D) systems. In this paper, a fast localization algorithm is proposed to implement the FEM-PIC/MCC method for refined plasma modeling of complex surfaces. The model was validated using comprehensive plasma diagnostics and DLC film deposition experiments. The effects of bias voltage on implantation flux, energy, and angle were systematically investigated. Key findings include that electrons establish the initial sheath structure through rapid response, followed by periodic oscillations, while ions dominate the subsequent sheath evolution through inertial motion. Increasing the bias voltage significantly enhances surface ion implantation flux and energy but compromises uniformity of ion implantation flux and increases implantation angles on tooth flanks. DLC composite films were deposited on polished silicon substrates. The films exhibited a non-uniform thickness distribution along the gear tooth profiles. Flank regions showed higher structural ordering and lower defect density. This study elucidates the spatial distribution and dynamic evolution of plasma near complex curved surfaces during PIII&D.