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<p>In recent years, selective laser-induced etching (SLE) has been recognized as the most promising method for through glass via (TGV) perforation. However, the morphology parameters of TGVs fabricated using SLE still mostly rely on empirical prediction. Also, there are still a series of morphology problems, such as irregularity and taper. This paper describes an experimental approach to systematically investigate the effect of various factors on the formation of TGVs. It was found that laser-induced cracks have a very significant impact on the final TGV formation quality. By reducing the length of the cracks, an optimization of the TGV irregularity can be achieved. Based on this, a physical model has been developed, which describes in detail the formation process of TGVs and explains the influence of laser-induced cracks on the TGV formation quality. Finally, a mathematical model is obtained by extrapolating from the physical model. This mathematical model enables accurate prediction of TGV morphology parameters by inputting several processing parameters.</p>

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Precise Morphology Tailoring of Through Glass Vias Perforated by Selective Laser-Induced Etching on Fused Silica

  • 期刊论文

  • 发表日期：

    2025年2月11日

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  • Jingli Liu,
  • Chunyan Yin,
  • Chenhui Xia,
  • Xuefei Ming,
  • Guangbin Dou

摘要

In recent years, selective laser-induced etching (SLE) has been recognized as the most promising method for through glass via (TGV) perforation. However, the morphology parameters of TGVs fabricated using SLE still mostly rely on empirical prediction. Also, there are still a series of morphology problems, such as irregularity and taper. This paper describes an experimental approach to systematically investigate the effect of various factors on the formation of TGVs. It was found that laser-induced cracks have a very significant impact on the final TGV formation quality. By reducing the length of the cracks, an optimization of the TGV irregularity can be achieved. Based on this, a physical model has been developed, which describes in detail the formation process of TGVs and explains the influence of laser-induced cracks on the TGV formation quality. Finally, a mathematical model is obtained by extrapolating from the physical model. This mathematical model enables accurate prediction of TGV morphology parameters by inputting several processing parameters.