Scholarlink

<p>A compact and highly sensitive gas pressure and temperature sensor based on Fabry-Pérot interferometer (FPI) and fiber Bragg grating (FBG) is proposed and demonstrated experimentally in this paper. The theoretical model for pressure and temperature sensing is established. Building on this foundation, a novel micro silicon cavity sensor structure sensitive to pressure is devised downstream of an FBG. The concept of separate measurement and the mechanisms enhancing pressure sensitivity are meticulously analyzed, and the corresponding samples are fabricated. The experimental results indicate that the pressure sensitivity of the sensor is −747.849 nm/MPa in 0–100 kPa and its linearity is 99.7% and it maintains good stability in 150 min. The sensor offers the advantages of compact size, robust construction, easy fabrication, and high sensitivity, making it potentially valuable for micro-pressure application.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Research on a compact and high sensitivity gas pressure sensor based on fiber Fabry-Pérot interferometer and Bragg grating

  • 期刊论文

  • 发表日期：

    2025年5月3日

查看全文
  • Qinpeng Liu,
  • Meihua Xing,
  • Di Yang,
  • Bo Liu,
  • Cheng Yan

摘要

A compact and highly sensitive gas pressure and temperature sensor based on Fabry-Pérot interferometer (FPI) and fiber Bragg grating (FBG) is proposed and demonstrated experimentally in this paper. The theoretical model for pressure and temperature sensing is established. Building on this foundation, a novel micro silicon cavity sensor structure sensitive to pressure is devised downstream of an FBG. The concept of separate measurement and the mechanisms enhancing pressure sensitivity are meticulously analyzed, and the corresponding samples are fabricated. The experimental results indicate that the pressure sensitivity of the sensor is −747.849 nm/MPa in 0–100 kPa and its linearity is 99.7% and it maintains good stability in 150 min. The sensor offers the advantages of compact size, robust construction, easy fabrication, and high sensitivity, making it potentially valuable for micro-pressure application.