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<p>Image segmentation is a valuable tool for visual image data inspection of semiconductor device structures. For the large amounts of data provided by recent advancements in automated scanning electron microscope (SEM) and focused ion beam-scanning electron microscope (FIB-SEM) data acquisition, automatic segmentation becomes indispensable to fully exploit the information contained in the data in automated characterization workflows. Using two exemplary FIB-SEM tomography datasets, we explored artificial intelligence-based image segmentation using only a minimum amount of training images annotated by a human user. Furthermore, we explored possibilities to automatically localize defects based on the segmentations.</p>

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Few-Shot AI Segmentation of Semiconductor Device FIB-SEM Tomography Data

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2025年7月15日

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  • Heiko Stegmann,
  • Flavio Cognigni

摘要

Image segmentation is a valuable tool for visual image data inspection of semiconductor device structures. For the large amounts of data provided by recent advancements in automated scanning electron microscope (SEM) and focused ion beam-scanning electron microscope (FIB-SEM) data acquisition, automatic segmentation becomes indispensable to fully exploit the information contained in the data in automated characterization workflows. Using two exemplary FIB-SEM tomography datasets, we explored artificial intelligence-based image segmentation using only a minimum amount of training images annotated by a human user. Furthermore, we explored possibilities to automatically localize defects based on the segmentations.