<p>In hybrid aerosol deposition (HAD), fine ceramic particles are sprayed by a thermal nonequilibrium plasma jet to fabricate a film under reduced pressure. The mechanism of the particle deposition is expected to be room-temperature impact consolidation (RTIC) with plasma assistance. Our previous work demonstrated that using a supersonic nozzle in HAD (called supersonic HAD) is effective in increasing particle velocity and film hardness. Furthermore, the film deposited via HAD with a stationary plasma torch and substrate had an M-shaped cross section. However, the factors that caused this film’s shape have been unclarified. In this study, therefore, a rotationally symmetric, two-dimensional (<i>r</i>–<i>z</i>) numerical analysis was performed to clarify the particle behavior in supersonic HAD. The numerical results showed that small particles, which would be deposited in HAD, impact the substrate over a wide area, whereas large particles, which can abrade the surface of the film and substrate, impact the central region of the substrate. This difference in the particle-impact region depending on particle size leads to a deposited film with an M-shaped cross section.</p>