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<p>Low-damage grinding of Nd:YAG crystals is essential for high-efficiency and high-quality fabrication of optical components. This study experimentally investigates the effects of ultrasonic vibration-assisted grinding parameters on surface morphology and subsurface damage depth of Nd:YAG crystals, and proposes a subsurface damage detection method based on metallographic mounting. The results show that axial ultrasonic vibration promotes surface micro-fracture and suppresses large-scale material spallation. Under optimized parameters, the maximum subsurface damage depth is reduced by up to 21.7%, and the axial grinding force is lowered by up to 86.7%, significantly improving surface and subsurface machining quality. Subsurface damage depth and grinding force increase with increasing feed rate and abrasive grain size, while decreasing with increasing ultrasonic amplitude and spindle speed. This study provides a theoretical and experimental basis for low-damage, high-efficiency grinding of Nd:YAG crystals and offers practical guidance for precision machining of hard, brittle optical materials.</p>

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Research on Surface Quality of YAG Crystal During Ultrasonic Vibration Grinding

  • 期刊论文

  • 发表日期：

    2026年7月24日

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  • Yu Chen,
  • Dong Wang,
  • Jinshuang Yang,
  • Jinxing Kong,
  • Dongxing Du,
  • Zhaocheng Wei

摘要

Low-damage grinding of Nd:YAG crystals is essential for high-efficiency and high-quality fabrication of optical components. This study experimentally investigates the effects of ultrasonic vibration-assisted grinding parameters on surface morphology and subsurface damage depth of Nd:YAG crystals, and proposes a subsurface damage detection method based on metallographic mounting. The results show that axial ultrasonic vibration promotes surface micro-fracture and suppresses large-scale material spallation. Under optimized parameters, the maximum subsurface damage depth is reduced by up to 21.7%, and the axial grinding force is lowered by up to 86.7%, significantly improving surface and subsurface machining quality. Subsurface damage depth and grinding force increase with increasing feed rate and abrasive grain size, while decreasing with increasing ultrasonic amplitude and spindle speed. This study provides a theoretical and experimental basis for low-damage, high-efficiency grinding of Nd:YAG crystals and offers practical guidance for precision machining of hard, brittle optical materials.