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<p>The combination of ceramic/metal multilayer architectures with post-annealing treatments provides a strategy for the precise regulation of microstructural and overall properties through interlayer synergistic effects. This approach was designed to address the microstructural instability and performance degradation of single-layer AlCoCrFeNi high-entropy alloy films under high-temperature service conditions, thereby meeting stringent protective requirements in aerospace and related fields. This study investigates the effects of annealing at 400, 600, and 800&#xa0;°C on the microstructure and properties of magnetron-sputtered Al<sub>2</sub>O<sub>3</sub>/AlCoCrFeNi nano-multilayer films. Microstructural characterization revealed that the amorphous Al<sub>2</sub>O<sub>3</sub> interlayers acted as effective diffusion barriers, suppressing extensive elemental interdiffusion and preserving the periodic layered structure even at 800&#xa0;°C. Mechanical properties peaked after annealing at 600&#xa0;°C, where the hardness increased from 9.21&#xa0;GPa (as-deposited) to 14.88&#xa0;GPa—an enhancement of 61.6%—accompanied by optimal toughness and ductility. With increasing annealing temperature, the corrosion resistance remained stable, attributable primarily to the Al<sub>2</sub>O<sub>3</sub> layers effectively pinning and disrupting the continuous growth of columnar grains. These findings offer valuable insights into the high-temperature protective performance of multilayer high-entropy alloy coatings in service environments.</p>

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Microstructure, Mechanical Properties, and Corrosion Resistance of Al2O3/AlCoCrFeNi Nano-Multilayer Films Subjected to Post-Annealing

  • 期刊论文

  • 发表日期：

    2026年5月11日

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  • Fuhao Pan,
  • Fanyong Zhang,
  • Hanlong Zhang,
  • Feng Wang,
  • Liangquan Wang,
  • Jing Fu,
  • Fuxing Yin

摘要

The combination of ceramic/metal multilayer architectures with post-annealing treatments provides a strategy for the precise regulation of microstructural and overall properties through interlayer synergistic effects. This approach was designed to address the microstructural instability and performance degradation of single-layer AlCoCrFeNi high-entropy alloy films under high-temperature service conditions, thereby meeting stringent protective requirements in aerospace and related fields. This study investigates the effects of annealing at 400, 600, and 800 °C on the microstructure and properties of magnetron-sputtered Al2O3/AlCoCrFeNi nano-multilayer films. Microstructural characterization revealed that the amorphous Al2O3 interlayers acted as effective diffusion barriers, suppressing extensive elemental interdiffusion and preserving the periodic layered structure even at 800 °C. Mechanical properties peaked after annealing at 600 °C, where the hardness increased from 9.21 GPa (as-deposited) to 14.88 GPa—an enhancement of 61.6%—accompanied by optimal toughness and ductility. With increasing annealing temperature, the corrosion resistance remained stable, attributable primarily to the Al2O3 layers effectively pinning and disrupting the continuous growth of columnar grains. These findings offer valuable insights into the high-temperature protective performance of multilayer high-entropy alloy coatings in service environments.