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<p>As the application of micro-devices became more and more popular, the micro-machining method has become an important processing technology. In situ laser-assisted imprinting (In-LAI) technology is in which a diamond indenter with an obtuse tip indents the workpiece under a hard substrate support while laser assists the deformation. This approach enabled the fabrication of micro tapered holes with large angles (&gt; 90°), small outlet diameters (&lt; 10&#xa0;μm), and large thicknesses (&gt; 300&#xa0;μm). Such structures were widely applied in fields such as microfluidics, micro-lighting, and biomedicine. To optimize the process, the response surface methodology (RSM) was adopted with the objective of minimizing the outlet size of the micro tapered holes. Under optimized parameters—30&#xa0;W laser power, 90° indenter angle, 1.25&#xa0;mm/min downward speed, and 5&#xa0;s holding time—micro tapered holes with 9.79&#xa0;μm outlet diameter were stably produced. In addition, the frictional behavior between the indenter and the workpiece was investigated. The results indicate that laser assistance transforms adhesive friction into sliding friction, and that the newly generated surface of the micro tapered holes is primarily formed in the middle region. This study contributes to pushing the processing limits of In-LAI technology, promotes its potential industrial applications, and further enriches the scope of in situ laser-assisted machining (In-LAM).</p>

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Frictional Mechanism and Experimental Study of in situ Laser-Assisted Imprinting of Micro Tapered Holes by Diamond Indenter

  • 期刊论文

  • 发表日期：

    2025年12月8日

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  • Siwei Meng,
  • Jifeng Zhang,
  • Guangfeng Shi

摘要

As the application of micro-devices became more and more popular, the micro-machining method has become an important processing technology. In situ laser-assisted imprinting (In-LAI) technology is in which a diamond indenter with an obtuse tip indents the workpiece under a hard substrate support while laser assists the deformation. This approach enabled the fabrication of micro tapered holes with large angles (> 90°), small outlet diameters (< 10 μm), and large thicknesses (> 300 μm). Such structures were widely applied in fields such as microfluidics, micro-lighting, and biomedicine. To optimize the process, the response surface methodology (RSM) was adopted with the objective of minimizing the outlet size of the micro tapered holes. Under optimized parameters—30 W laser power, 90° indenter angle, 1.25 mm/min downward speed, and 5 s holding time—micro tapered holes with 9.79 μm outlet diameter were stably produced. In addition, the frictional behavior between the indenter and the workpiece was investigated. The results indicate that laser assistance transforms adhesive friction into sliding friction, and that the newly generated surface of the micro tapered holes is primarily formed in the middle region. This study contributes to pushing the processing limits of In-LAI technology, promotes its potential industrial applications, and further enriches the scope of in situ laser-assisted machining (In-LAM).