<p>Multilayer coatings have garnered significant attention in recent years due to their exceptional properties, which are highly influenced by the deposition parameters such as N₂/Ar flow ratio. In this study, three AlCrSiN/AlTiN multilayer coatings were fabricated using hybrid arc ion plating and DC magnetron sputtering with varying N₂/Ar flow ratios to investigate their effects on coating properties. Structural analysis reveals an fcc-(Al,Cr,Ti)N solid solution with preferential (200) orientation. As the N₂/Ar ratio increases, both grain size and surface roughness decreases. The mechanical properties show a non-monotonic trend, with peak hardness (35.10 GPa) and adhesion strength (54.54 N) achieved at a 4:1 N₂/Ar ratio before declining at higher ratios due to the competing effects of grain refinement and target poisoning. The coating deposited at a 4:1 N₂/Ar ratio demonstrates optimal mechanical performance, exhibiting the highest H/E^* and H³/E^*2 values, indicative of superior resistance to crack propagation and plastic deformation. Furthermore, this coating displays the best tribological and corrosion performance, achieving the lowest wear rate (8.2 × 10⁻⁶ mm³/N·m) and highest corrosion resistance. These enhancements are ascribed to its dense microstructure, increased hardness, and minimized surface defects.</p>