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<p>Diamond polishing is a critical process for single-crystal diamond applications, as its surface quality directly impacts the performance of optical windows. To achieve high-quality processing of single-crystal diamond, this study utilizes SG fiber polishing pads containing a mixed abrasive of diamond and cerium oxide for mechanochemical polishing. The effects of three different types of cerium oxide on processing were compared through morphology and elemental analysis. The results show that cerium oxide induces the formation of amorphous carbon on the diamond surface through mechanical friction and catalyzes its transformation into graphite. This method achieves a material removal rate of 206.4 nm/h while maintaining a surface roughness of Ra = 0.6 nm, with an amorphous carbon layer thickness of only 3.242 nm. This research offers a novel method for the precision machining of single-crystal diamond optical components.</p>

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Optimizing High-Quality Single-Crystal Diamond through Mechanochemical Polishing with Cerium Oxide and Diamond-Mixed Abrasive SG Pad

  • 期刊论文

  • 发表日期：

    2025年8月7日

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  • Yongkang Xin,
  • Jing Lu,
  • Jiawei Wang,
  • Ning Yan

摘要

Diamond polishing is a critical process for single-crystal diamond applications, as its surface quality directly impacts the performance of optical windows. To achieve high-quality processing of single-crystal diamond, this study utilizes SG fiber polishing pads containing a mixed abrasive of diamond and cerium oxide for mechanochemical polishing. The effects of three different types of cerium oxide on processing were compared through morphology and elemental analysis. The results show that cerium oxide induces the formation of amorphous carbon on the diamond surface through mechanical friction and catalyzes its transformation into graphite. This method achieves a material removal rate of 206.4 nm/h while maintaining a surface roughness of Ra = 0.6 nm, with an amorphous carbon layer thickness of only 3.242 nm. This research offers a novel method for the precision machining of single-crystal diamond optical components.