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<p>In this study, the TiSiN-Ag composite coating and TiSiN-Ag/TiN multilayer nanostructured coatings with varying modulation periods were deposited using magnetron sputtering technology. The microstructure and tribological behavior of the TiSiN-Ag/TiN multilayer coatings depending on modulation periods were investigated. The results revealed that the TiSiN-Ag coating and TiSiN-Ag/TiN multilayer coatings consisted of TiN phases, Ag phases, and amorphous SiNx phases. The TiSiN-Ag(15&#xa0;nm)/TiN(15&#xa0;nm) multilayer coating exhibited the highest hardness (9.86 ± 1.15 GPa), the resistance to elastic strain failure (0.0556) and plastic strain to failure (0.0304 GPa), as well as the lowest elastic modulus (177.43 ± 5.46 GPa). Additionally, it also demonstrated the lower friction coefficient (0.55 ± 0.056) and wear rate (3.164 × 10<sup>-5</sup> mm<sup>3</sup>/(N·m)). The multilayer design of the TiSiN-Ag coatings significantly improved its wear resistance. The wear track morphology indicate that the wear mechanisms of the TiSiN-Ag and TiSiN-Ag/TiN multilayer coatings mainly include adhesive and oxidative wear.</p>

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Influence of Modulation Period on Microstructure and Properties of TiSiN-Ag/TiN Multilayer Coatings

  • 期刊论文

  • 发表日期：

    2025年7月2日

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  • Ting-yu Ren,
  • Hong-jian Zhao,
  • Hai-xiao Fang,
  • Ji-ning He

摘要

In this study, the TiSiN-Ag composite coating and TiSiN-Ag/TiN multilayer nanostructured coatings with varying modulation periods were deposited using magnetron sputtering technology. The microstructure and tribological behavior of the TiSiN-Ag/TiN multilayer coatings depending on modulation periods were investigated. The results revealed that the TiSiN-Ag coating and TiSiN-Ag/TiN multilayer coatings consisted of TiN phases, Ag phases, and amorphous SiNx phases. The TiSiN-Ag(15 nm)/TiN(15 nm) multilayer coating exhibited the highest hardness (9.86 ± 1.15 GPa), the resistance to elastic strain failure (0.0556) and plastic strain to failure (0.0304 GPa), as well as the lowest elastic modulus (177.43 ± 5.46 GPa). Additionally, it also demonstrated the lower friction coefficient (0.55 ± 0.056) and wear rate (3.164 × 10-5 mm3/(N·m)). The multilayer design of the TiSiN-Ag coatings significantly improved its wear resistance. The wear track morphology indicate that the wear mechanisms of the TiSiN-Ag and TiSiN-Ag/TiN multilayer coatings mainly include adhesive and oxidative wear.