Study on the Influence of Curing Method on the Lapping Performance of Fixed Abrasive Pads
摘要
This paper investigated a new hybrid resin abrasive pad to improve quartz glass’s lapping efficiency and process stability. The preparation process of fixed abrasive pads was studied by using light and heat dual curing (ultraviolet curing technology and thermal curing technology). The relationship between light and heat dual curing fixed abrasive pads and their processing properties was analyzed in detail using material removal rate (MRR), surface roughness (SR), coefficient of friction (COF), and hardness (HD) as evaluation indicators. By improving the original light curing fixed abrasive pad technology, the advantages of using light and heat dual curing technology to prepare fixed abrasive pads were analyzed. The test results show that the MRR of three light and heat dual curing fixed abrasive pads (white corundum, diamond, and aggregate diamond) to quartz glass are 4.13, 5.93, and 3.62 μm/min, respectively, which are 4.3, 1.4, and 1.2 times higher than that of light curing abrasive pads. The three-dimensional cross-linked network structure is generated, which significantly increases the matrix strength of the abrasive pad and improves the processing performance. This study prepared an abrasive pad with excellent comprehensive properties, which provided a new processing tool and method for high-efficiency and high-quality lapping of quartz glass.