Exploring ZnO-Based pn Homojunction for Gas Sensing Applications: Fabrication and Performance Evaluation
摘要
In this study, we have developed engineered ZnO-based p-n junction NO2 gas sensors with exceptional sensitivity and selectivity. Initially, undoped ZnO and Na-doped ZnO films were synthesized using RF sputtering and the sol-gel technique, respectively. A comprehensive investigation of the material properties, including structural, elemental composition, morphological characteristics, and electrical behavior, was conducted. Hall measurement studies confirmed that undoped ZnO functions as an n-type semiconductor with a resistivity of 6.76 × 10 3Ω/cm., while Na-doped ZnO exhibits p-type semiconductor characteristics with a resistivity of 1.77 × 10 3Ω/cm. I-V measurements at room temperature demonstrated a clear rectifying behavior of the ZnO-based p-n homojunction, which was further validated by simulation results obtained using Silvaco TCAD, showing excellent agreement with the experimental data. The NO2 gas sensing performance of the fabricated ZnO homojunction was evaluated, revealing superior sensitivity at an optimal operating temperature of 240 °C. The sensor achieved a remarkable response of 1656%, with rapid response and recovery times of 20 s and 93 s, respectively, for a test gas concentration of 45 ppm. The ZnO homojunction demonstrated detection capability at 1 ppm and high NO2 selectivity characteristics in the presence of other gases like NO, NH3, and acetone. The long-term stability of the fabricated homojunction sensor underscores its reliability and efficiency as a gas-sensing device.