Improved Mechanical and Tribological Properties of TaMoN-MoSx Sputtered Film by Addition of MoS2 Lubricants
摘要
Modification of transition metal nitride films is expected to reinforce mechanical and tribological properties for protective coatings. In this work, TaMoN-MoSx films with addition of MoS2 lubricants are deposited by magnetron sputtering. Mo substitution in nitride lattice is observed, which increases the hardness and strength of film. The addition of MoS2 results in the composite strengthening effect and provide low and stable friction. For film with MoS2 target power of 60 W, the average friction coefficient and wear resistance in sliding test against steel ball is 0.143 and 5.8 × 10−8 mm3/Nm, respectively. In sliding test against Si3N4 ball, low friction coefficient is deserved until 2800 cycles before generation of hard debris, exhibiting well durability and wear resistance.