<p>Reducing operating power while maintaining a robust read margin remains a key challenge for resistive random-access memory devices. In this work, planar indium tin oxide (ITO)/tungsten oxide (WO<sub><i>x</i></sub>)/ITO resistive random-access memory devices incorporating porous helical <InlineEquation ID="IEq2"> <EquationSource Format="TEX">\(\hbox {WO}_x\)</EquationSource> <EquationSource Format="MATHML"><math> <msub> <mtext>WO</mtext> <mi>x</mi> </msub> </math></EquationSource> </InlineEquation> active layers, fabricated using a glancing angle deposition method, are compared with conventional thin-film architectures to evaluate how active-layer geometry influences low-power switching behavior. While both device types exhibit comparable operation at a compliance current limit of 5&#xa0;mA, only the helical devices sustain reproducible bipolar switching at a reduced compliance of 500&#xa0;μA. In this low-current regime, switching power is reduced by nearly an order of magnitude while the memory window increases by approximately 5–7 times due to the selective suppression of high-resistance-state leakage. These results demonstrate that active-layer geometry enables a low-power, high-margin operating regime inaccessible to thin-film devices, providing a scalable pathway for energy-efficient resistive random-access memory devices in transparent, flexible, and high-surface-area systems.</p>

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Switching Layer Design and Its Influence on RRAM Power Efficiency

  • John F. Hardy II,
  • Guilherme S. Y. Giardini,
  • Jack A. Garrard,
  • Carlo R. daCunha

摘要

Reducing operating power while maintaining a robust read margin remains a key challenge for resistive random-access memory devices. In this work, planar indium tin oxide (ITO)/tungsten oxide (WOx)/ITO resistive random-access memory devices incorporating porous helical \(\hbox {WO}_x\) WO x active layers, fabricated using a glancing angle deposition method, are compared with conventional thin-film architectures to evaluate how active-layer geometry influences low-power switching behavior. While both device types exhibit comparable operation at a compliance current limit of 5 mA, only the helical devices sustain reproducible bipolar switching at a reduced compliance of 500 μA. In this low-current regime, switching power is reduced by nearly an order of magnitude while the memory window increases by approximately 5–7 times due to the selective suppression of high-resistance-state leakage. These results demonstrate that active-layer geometry enables a low-power, high-margin operating regime inaccessible to thin-film devices, providing a scalable pathway for energy-efficient resistive random-access memory devices in transparent, flexible, and high-surface-area systems.