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<p>This study presents the design, simulation, and experimental validation of a microelectromechanical systems (MEMS)-based ethylene (C<sub>2</sub>H<sub>4</sub>) gas sensor aimed at early leakage detection in lithium-ion batteries. The sensor integrates a microheater and a porous SnO<sub>2</sub> sensing layer, optimized through COMSOL Multiphysics by coupling heat transfer and gas diffusion mechanisms. Simulation results identified that minimal power input of 0.057&#xa0;W was sufficient to heat the sensing layer to 200°C within 1&#xa0;s, confirming the microheater’s energy-efficient performance. Electrical characterization of the fabricated device revealed linear current–voltage (<i>I–V</i>) behavior, indicating stable ohmic contact. Sensitivity analysis conducted at 25°C, 200°C, and 400°C across ethylene concentrations of 1–512&#xa0;ppm showed a significantly enhanced sensor response with increasing temperature and gas concentration. The highest sensitivity was recorded at 400°C, with electrical conductivity sharply increasing beyond 128&#xa0;ppm. Selectivity tests also confirmed a superior response to ethylene (C<sub>2</sub>H<sub>4</sub>) over interfering gases, including CO<sub>2</sub>, NH<sub>3</sub>, N<sub>2</sub>O, and H<sub>2</sub>S. Quantitative validation between simulated and experimental sensitivity values yielded percentage errors as low as 5.26% and root-mean-square error (RMSE) of 0.0431 at 200°C, establishing strong agreement and model accuracy. These findings highlight the potential of the integrated simulation–experimental approach for developing low-power, high-performance gas sensors suited for real-time battery safety monitoring. This work presents a low-power MEMS-based ethylene sensor, demonstrating strong agreement between simulation and experiment, with a temperature of 200°C achieved at just 0.057&#xa0;W. High sensitivity and selectivity were observed, validating the sensor’s suitability for early leakage detection in lithium-ion batteries.</p>

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Fabrication and Multiphysics Evaluation of a SnO2 MEMS Gas Sensor for Ethylene Detection in Battery Systems

  • 期刊论文

  • 发表日期：

    2026年3月5日

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  • Krishnaprasath Dharmaraj,
  • Gulshan Kumar,
  • Harsh Ranjan,
  • Saurabh Kumar Pandey

摘要

This study presents the design, simulation, and experimental validation of a microelectromechanical systems (MEMS)-based ethylene (C2H4) gas sensor aimed at early leakage detection in lithium-ion batteries. The sensor integrates a microheater and a porous SnO2 sensing layer, optimized through COMSOL Multiphysics by coupling heat transfer and gas diffusion mechanisms. Simulation results identified that minimal power input of 0.057 W was sufficient to heat the sensing layer to 200°C within 1 s, confirming the microheater’s energy-efficient performance. Electrical characterization of the fabricated device revealed linear current–voltage (I–V) behavior, indicating stable ohmic contact. Sensitivity analysis conducted at 25°C, 200°C, and 400°C across ethylene concentrations of 1–512 ppm showed a significantly enhanced sensor response with increasing temperature and gas concentration. The highest sensitivity was recorded at 400°C, with electrical conductivity sharply increasing beyond 128 ppm. Selectivity tests also confirmed a superior response to ethylene (C2H4) over interfering gases, including CO2, NH3, N2O, and H2S. Quantitative validation between simulated and experimental sensitivity values yielded percentage errors as low as 5.26% and root-mean-square error (RMSE) of 0.0431 at 200°C, establishing strong agreement and model accuracy. These findings highlight the potential of the integrated simulation–experimental approach for developing low-power, high-performance gas sensors suited for real-time battery safety monitoring. This work presents a low-power MEMS-based ethylene sensor, demonstrating strong agreement between simulation and experiment, with a temperature of 200°C achieved at just 0.057 W. High sensitivity and selectivity were observed, validating the sensor’s suitability for early leakage detection in lithium-ion batteries.