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<p>This study introduces a novel micro-electro-mechanical system (MEMS)-based vector hydrophone specifically designed for efficient and reliable detection of low-frequency seismic activity in underwater environments. By integrating piezoelectric sensing with advanced MEMS technology, the device achieves superior sensitivity, precise directional response, and low power consumption within a compact and scalable architecture. The hydrophone features a novel architecture of nine segmented beams supporting a central circular proof mass, realized on a polysilicon substrate with a PZT-5H piezoelectric layer and polysilicon proof mass, tuned to resonate at 22&#xa0;Hz. Comprehensive high-fidelity simulations conducted in COMSOL Multiphysics software confirm the robust performance of the device. The displacement responses span from 0.45 to 45.4 <i>µ</i>m, while the corresponding voltage outputs range between −&#xa0;180 mV and 420 mV. This translates to a sensitivity level of –121&#xa0;dB re 1&#xa0;V/<i>µ</i>Pa at 22&#xa0;Hz, underscoring the hydrophone’s high detection capability in aquatic conditions. The findings validate the hydrophone’s significant potential as an innovative MEMS device for capturing low-frequency seismic signals with exceptional reliability. Its demonstrated performance establishes a promising pathway toward next-generation deep-sea seismic exploration technologies.</p> Graphical abstract <p></p>

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Optimized MEMS Vector Hydrophone for Robust and High-Sensitivity Underwater Seismic Detection

  • 期刊论文

  • 发表日期：

    2025年11月22日

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  • S. Sri Lakshmi,
  • V. Amirtha Raj,
  • R. Joseph Daniel

摘要

This study introduces a novel micro-electro-mechanical system (MEMS)-based vector hydrophone specifically designed for efficient and reliable detection of low-frequency seismic activity in underwater environments. By integrating piezoelectric sensing with advanced MEMS technology, the device achieves superior sensitivity, precise directional response, and low power consumption within a compact and scalable architecture. The hydrophone features a novel architecture of nine segmented beams supporting a central circular proof mass, realized on a polysilicon substrate with a PZT-5H piezoelectric layer and polysilicon proof mass, tuned to resonate at 22 Hz. Comprehensive high-fidelity simulations conducted in COMSOL Multiphysics software confirm the robust performance of the device. The displacement responses span from 0.45 to 45.4 µm, while the corresponding voltage outputs range between − 180 mV and 420 mV. This translates to a sensitivity level of –121 dB re 1 V/µPa at 22 Hz, underscoring the hydrophone’s high detection capability in aquatic conditions. The findings validate the hydrophone’s significant potential as an innovative MEMS device for capturing low-frequency seismic signals with exceptional reliability. Its demonstrated performance establishes a promising pathway toward next-generation deep-sea seismic exploration technologies.

Graphical abstract