Impact of Annealing on Morphology and Electrical Properties of CoCrFeMnNi HEA Thin Films for Antennas
摘要
This study investigates the morphology and electrical properties of CoCrFeMnNi high-entropy alloy (HEA) thin films designed for 6G antenna applications. The films were deposited at 300°C (S300) and subsequently subjected to vacuum annealing at 500°C (300-A500). The antenna was designed using CoCrFeMnNi HEA thin films using CST Microwave Studio Suite 2024 software. Grazing incidence x-ray diffraction results demonstrated a transition from an amorphous to a crystalline phase following the annealing process, evidenced by the emergence of new manganese oxide (MnO) peaks. The findings were further supported by field emission scanning electron microscopy, which revealed that S300 has a refined surface morphology. In contrast, 300-A500 has a coarse surface morphology due to an increase in white spots attributed to the formation of MnO. Four-point probe measurements indicated conductivity of 4.17 × 105 S/m for the S300 film. Based on the simulation analysis designed using CST Microwave Studio Suite 2024 software, the antenna achieved a gain of 2.4 dBi. These findings underscore the structural and conductive enhancements of CoCrFeMnNi HEA thin films, positioning them as promising candidates for antenna applications.