Optimized Gate Metal Variant Structure for Graded-Channel (GC) Gate-Stack (GS) Double-Gate (DG) MOSFET to Enhance Switching Speed, Analog and RF Performance
摘要
Graded-channel gate-stack double-gate metal-oxide-semiconductor field-effect transistors (GC-GS-DG-MOSFETs) with symmetric single-material-gate-metal (D1), asymmetric single-material-gate-metal (D2 and D3), dual-material-gate-metal (D4 and D5), and triple-material-gate-metal (D6 and D7) have been investigated to optimize the best structure for ultra-fast digital logic circuit and RF microwave circuit applications. The work function (