Quantitative Analysis of Microstructural Heterogeneity in Amorphous TiCrNiZrMoW High-Entropy Alloy Coatings via Line-Wise Shannon Entropy Profiling
摘要
Line-wise Shannon entropy profiling of scanning electron microscopy (SEM) cross-sections was applied to quantify through-thickness heterogeneity in amorphous TiCrNiZrMoW high-entropy alloy coatings. Entropy was used to capture local grey-level variability as a proxy for packing density and structural complexity. Coatings were deposited by pulsed magnetron sputtering at two powers (600 and 1000 W) and two modulation frequencies (10 and 1000 Hz). All films remained fully amorphous with consistent short-range order, whereas power-dependent shifts in medium-range order and entropy were observed. Lower power produced thinner, more heterogeneous layers that combined higher hardness (10.5 GPa) with higher modulus (≈ 160 GPa), whereas higher power produced thicker, more uniform films with reduced stiffness. Line-wise entropy was found to correlate strongly with depth-resolved nanoindentation, supporting a quantitative association between microstructural heterogeneity and mechanical gradients. These results demonstrate that image entropy can serve as a rapid metric for optimization of amorphous-coating processes.